ASML’s official product materials frame the company around advanced lithography systems plus a broader holistic lithography stack that includes computational lithography, metrology, and inspection. Its own pages explain that these software and measurement layers are essential to manufacturing leading-edge chips at modern process nodes.
Recent official releases also show ASML extending that stack into High NA EUV process-development environments. That supports a profile spanning custom semiconductor machinery, inspection and metrology, and tightly integrated control software.